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Инд. авторы: Bulgakova N.M., Zhukov V.P., Mirza I., Meshcheryakov Y.P., Tomáštík J., Michálek V., Haderka O., Fekete L., Rubenchik A.M., Fedoruk M.P., Mocek T.
Заглавие: Ultrashort-pulse laser processing of transparent materials: Insight from numerical and semi-analytical models
Библ. ссылка: Bulgakova N.M., Zhukov V.P., Mirza I., Meshcheryakov Y.P., Tomáštík J., Michálek V., Haderka O., Fekete L., Rubenchik A.M., Fedoruk M.P., Mocek T. Ultrashort-pulse laser processing of transparent materials: Insight from numerical and semi-analytical models // Proceedings of SPIE - The International Society for Optical Engineering. - 2016. - Vol.9735. - Art.97350N. - ISSN 0277-786X.
Внешние системы: DOI: 10.1117/12.2217585; РИНЦ: 27225877; РИНЦ: 27126210; SCOPUS: 2-s2.0-84981188302; WoS: 000379995000014;
Реферат: eng: Interaction of ultrashort laser pulses with transparent materials is a powerful technique of modification of material properties for various technological applications. The physics behind laser-induced modification phenomenon is rich and still far from complete understanding. We present an overview of our models developed to describe processes induced by ultrashort laser pulses inside and on the surface of bulk glass. The most sophisticated model consists of two parts. The first part solves Maxwell's equations supplemented by the rate and hydrodynamics equations for free electrons. The model resolves spatiotemporal dynamics of free-electron population and yields the absorbed energy map. The latter serves as an initial condition for thermoelastoplastic simulations of material redistribution. The simulations performed for a wide range of irradiation conditions have allowed to clarify timescales at which modification occurs after single laser pulses. Simulations of spectrum of laser light scattered by laser-generated plasma revealed considerable blueshifting which increases with pulse energy. To gain insight into temperature evolution of a glass material under the surface irradiation conditions, we employ a model based on the rate equation describing free electron generation coupled with the energy equations for electrons and lattice. Swift heating of electron and lattice subsystems to extremely high temperatures at fs timescale has been found at laser fluences exceeding the threshold fluence by 2-3 times that can result in efficient bremsstrahlung emission from the irradiation spot. The mechanisms of glass ablation with ultrashort laser pulses are discussed by comparing with the experimental data. Finally, a model is outlined, developed for multi-pulse irradiation regimes, which enables gaining insight into the roles of defects and heat accumulation. Copyright © 2016 SPIE.
Ключевые слова: Laser materials processing; Technological applications; Spatio-temporal dynamics; Multi-pulse irradiation; Modification of materials; Laser induced modification; Laser generated plasmas; Bremsstrahlung emission; Ablation thresholds; Ultrashort pulses; Ultrafast lasers; Plasma diagnostics; Models; Microelectronics; Maxwell equations; Manufacture; Laser pulses; Laser applications; Laser ablation; Irradiation; Glass; Electrons; Dielectric materials; Ablation; modeling; laser-induced modification; femtosecond laser irradiation; dielectrics; ablation threshold;
Издано: 2016
Конференция: Название: Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing XXI
Аббревиатура: LAMOM-2016
Город: San Francisco
Страна: USA
Даты проведения: 2016-02-15 - 2016-02-18
Ссылка: http://proceedings.spiedigitallibrary.org/volume.aspx?volumeid=17582
Цитирование: 
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